Stiffening of organosilicate glasses by organic cross-linking
نویسندگان
چکیده
Atomistic simulations show that organosilicates, used as low permittivity dielectric materials in advanced integrated circuits, can be made substantially stiffer than amorphous silica, while maintaining a lower mass density. The enhanced stiffness is achieved by incorporating organic cross-links to replace bridging oxygen atoms in the silica network. To elucidate the mechanism responsible for the enhanced stiffness, the conformational changes in the network upon hydrostatic and shear loading are examined. The structural and mechanical impact of terminal methyl groups is also assessed quantitatively and compared with continuous random network theory. 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
منابع مشابه
Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass
Articles you may be interested in Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation Appl. The effect of water uptake on the mechanical properties of low-k organosilicate glass Mechanism of plasma-induced damage to low-k SiOCH films during plasma ashing of organic resists Plasma damage effects on low-k porous organosilicate glass Short-ranged st...
متن کاملInfluence of CH2 content and network defects on the elastic properties of organosilicate glasses
Influence of CH2 content and network defects on the elastic properties of organosilicate glasses Jan M. Knaup,1,2,* Han Li,3,† Joost J. Vlassak,3 and Efthimios Kaxiras1,2,3,‡ 1Institute of Materials Science, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland 2Department of Physics, Harvard University, Cambridge, Massachusetts 02138, USA 3School of Engineering and Applied Sc...
متن کاملRole of collagen content and cross-linking in large pulmonary arterial stiffening after chronic hypoxia.
Chronic hypoxic pulmonary hypertension (HPH) is associated with large pulmonary artery (PA) stiffening, which is correlated with collagen accumulation. However, the mechanisms by which collagen contributes to PA stiffening remain largely unexplored. Moreover, HPH may alter mechanical properties other than stiffness, such as pulse damping capacity, which also affects ventricular workload but is ...
متن کاملDistribution of Young's Modulus in Porcine Corneas after Riboflavin/UVA-Induced Collagen Cross-Linking as Measured by Atomic Force Microscopy
Riboflavin/UVA-induced corneal collagen cross-linking has become an effective clinical application to treat keratoconus and other ectatic disorders of the cornea. Its beneficial effects are attributed to a marked stiffening of the unphysiologically weak stroma. Previous studies located the stiffening effect predominantly within the anterior cornea. In this study, we present an atomic force micr...
متن کاملBacillus sp. PS35 Lipase-Immobilization on Styrene-Divinyl Benzene Resin and Application in Fatty Acid Methyl Ester Synthesis
Background: Lipase is an enzyme with immense application potential. Ester synthesis by lipase catalysis in organic media is an area of key industrial relevance. Enzymatic preparations with traits that cater to the needs of this function are hence being intensely researched. Objective: The objectives of the study were to immobilize the lipase from Bacillus sp. PS35 by cross-linking and adsorpti...
متن کامل